CDA EVG Series podręczniki

Cda EVG Series Instrukcje Operacyjne (370 strony)

Marka: Cda | Kategoria: Nie | Rozmiar: 15.40 MB |

Spis treści

520HE Users Manual

General Information

1 Note to the User

2 About this Manual

3 Recovery from Errors

Interlock List

Table of Contents

1 Interlock List

1.1 Leak Sensor

1.2 Water Flow Sensor

1.3 Over Temperature Sensor

Location:

1.4 EMO Button

2 Circuit Diagrams

Start Up and GUI

1 System Description

1.2 Safety

2 System Startup

Figure 4 - Overview Stations

De-embossing Station

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EVG Explorer

1 Overview

1.1 Title Bar

1.2 Main Area

1.2.1 Application Groups

1.2.1.1 Maintenance Tools

1.2.2 Applications

1.2.2.2 Maintenance Tools

1.2.3.1 Login / Change User

1.2.3.2 Log Off

1.2.3.3 Shut Down

1.3 Task Bar

1.3.2 Running Applications

1.3.3 Date and Time

2 “EVG Remote Support” Tool

2.1 EVG TechSupport offline

2.2 EVG TechSupport online

2.3 Benefits

2.4 Requirements

3 “EVG Manual Copy” Tool

3.2 Open Manual

3.3 Troubleshooting

Start Up

1 Start Up

1.2 Initialize

1.3.1 Disconnected State

1.3.3 Ready State

1.3.4 Maintenance Mode

Figure 12 - Maintenance Mode

1.3.5 Executing State

1.3.6 Cleanup State

Figure 14 - Basic Layout

Status Information

Navigation Bar

2.1 Jobs

2.1.1 Overview Stations

2.1.1.1 Station Status

Figure 21 - Slot States

2.1.2 Overview Jobs

Figure 22 - Overview Jobs

2.2 Modules

2.3 Recipes

2.4 System

2.4.1 Overview

Figure 27 - System Frame

2.4.2 Safety Doors

2.4.3 Tooling Profiles

2.4.4 Facility Management

2.4.5 Tracking

2.5 Setup

Add User

Remove User

Properties

2.5.2 Light Tower Settings

3.1 Job Controls

3.2 Clean Up (optional)

3.3 Add Job

Jobs

Figure 38 - Add Job Window

3.4 Execute Job

4.1 Recipe Namespace

4.1.3 Delete Namespace

4.2 Recipe Overview

4.2.1 Select Namespace

4.2.2 Select Single Recipe

Figure 47 - Recipe Selection

Figure 48 - Common Task View

4.2.4 Select Version

Figure 50 - Common Task View

4.3 Create New Recipe

Figure 54 - Sample Recipe

100

EVG CIMFramework - Core

101

4.3.3 Recipe Commands

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Figure 55 - Recipe Commands

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4.3.4 Recipe Flow Diagram

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4.3.5 Common Task View

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4.4 Edit Recipe

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4.4.3 Recipe Command Menu

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2 bond modules:

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4 cooling chucks:

106

10 buffer station slots:

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4.4.3.4 Copy Recipe Command

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4.4.4 Context Menu

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4.4.5 Delete Recipe Command

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4.4.6 Link Recipe Commands

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4.5 Open Recipe

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4.6 Save Recipe

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4.7 Export Recipe

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4.8 Delete Recipe

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4.9 Recipe Validation

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4.10 Recipe Linking

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4.11 Recipe Code

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5 Safety Doors

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5.2 Open Safety Doors

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5.3 Close Safety Doors

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6 Analysis

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6.2 DataValue State

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6.3 Performance Tracking

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6.4 Reports

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7 Alarms

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7.2 Alarm Situation

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8.1 I/O Axis Field

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9 Shut Down

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Shut Down

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History

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EV Group Support:

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Bond Module

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Module Description

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1 Module Description

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1.2 Bond Module

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1.3 Bond Chuck

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1.4 Safety

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Figure 7 - Cover Clamp

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1.4.3 Facility Problems

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2 Process Description

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2.2 Anodic Wafer Bonding

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2.3 Adhesive Wafer Bonding

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2.4 Glass Frit Wafer Bonding

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2.5 Eutectic Wafer Bonding

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Process Description

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3.1 Jobs

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3.2 Modules

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GUI

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Figure 17 - Vacuum System

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Designation

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4 Recipe Programming

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4.2 Recipes

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Recipe Programming

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Sequence Recipe Editor

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4.2.1.1 Move Recipe Step

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4.3 Recipe Steps

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4.3.1 Heater

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4.3.1.2 Wait Temperature

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4.3.1.3 Preheat

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4.3.1.4 Equalize

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4.3.2 Vacuum System

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4.3.2.2 Purge

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4.3.2.3 Evacuate-Purge

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4.3.2.4 Wait Pressure

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4.3.3 General

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4.3.3.3 Timer

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4.3.3.4 Monitoring

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4.3.4 Piston

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4.3.4.3 Wait Force

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4.3.5 Voltage

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4.3.5.2 Wait Current

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4.3.5.3 Wait Charge

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4.3.5.4 Check Resistance

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5 High Level Menu

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5.1 Cover

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5.2 Heater

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5.3 Piston

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5.4 Vacuum System

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Figure 42

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High Level Menu

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5.4.3 Evacuate – Purge

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Figure 41

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5.5 High Voltage

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5.6 Flags

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5.7 Recorder

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5.8 Wafer Bow

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5.9 Resistance

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6 Recorder Software

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6.2 Choose Parameters

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Recorder Software

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6.3 Measure Bars

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6.3.2 Move Measure Bar

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6.3.3 Delete Measure Bar

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6.4 Zoom

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6.5.1 Grids

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6.5.2 File Info

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6.5.3 “Printing”

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6.5.4 “About Recorder”

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6.5.5 Save / Open

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Maximum Piston Force

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1 Maximum Piston Force

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Note to the User

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1 Note to the User

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2 Safety

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3 Daily Maintenance

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3.2 Main Pressure

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Daily Maintenance

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3.3.1 Allowed Gases

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3.4 Bond Tools

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3.4.1 Bond Tool Insert

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Figure 7

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3.5 Flags

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3.6 Clamping Feet

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3.7 Clamping Force

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3.7.2 Prepare Bondchuck

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3.7.6 Measurement

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3.7.7 Clamping Force

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Figure 18 - Grub screw

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Figure 19

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Figure 20 - Clamping arm

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Figure 21 - Top view

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Figure 22 - Front view

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Figure 18- Force Gauge

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Measurement:

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3.8 Clamping glasses

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4 Weekly Maintenance

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Weekly Maintenance

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Parameters

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Max. Pressure cannot be kept

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Figure 24 - Hydraulic System

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Figure 25

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Figure 26

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Figure 27

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Figure 28

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Figure 29

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4.3.2.1 Schematics

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With backpressure control

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Function description

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Components

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Figure 35 - Top Cap

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Figure 37 - Square Plate

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Figure 38 - Piston Rod

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Removing of obsolete parts

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Figure 41 - Leak Line

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Figure 42 - Separation Tank

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Settings

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Figure 46 - Apply Caliper

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Figure 48 - Apply Caliper

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Tech tips

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Figure 50 - Load Cell

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4.4 High Voltage

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4.5 Cover Clamps

264

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4.5.1 Working principle

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4.6 Wafer Bow

267

269

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4.6.1.3 CAN System

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1 Coarse zero

273

(edge – zero)

273

2 Fine zero

273

4.7 Uniformity Check

274

Figure 59 - SI Wafer

275

4.7.2 Check Flatness

277

4.7.3 Heater Flatness

278

Figure 64 - Bottom Heater

279

4.7.4 Bond Tool Flatness

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4.8 Flag Pulling Mechanism

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4.8.1 Adjustment of Flags

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4.8.1.2 Flag Orientation

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4.9 Pressure Insert

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Figure 78

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Figure 79 - Clamp

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Figure 80 - Fix disc

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Figure 81

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Figure 82

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4.10 Cleaning

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4.11.1 Pfeifer – THM07x

291

Figure 84 - Water System

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Figure 85 - Water System

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4.13.1 Reset procedure

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5 Monthly Maintenance

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5.3 Tool Detection

297

5.4 Piston Motion

298

5.5 Load Cell Test

298

Figure 93

299

Figure 95

300

301

Figure 99 - Remove screw

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Figure 100

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Figure 101

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Monthly Maintenance

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Figure 104

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Mainswitch

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5.7.3 Check EMO Button

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5.8 Vacuum System

309

5.8.1 Maintenance Evacuate

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5.8.2 Maintenance Purge

310

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5.9 Safety Valve

312

5.10 Gauges

313

5.11 Roughing Pump

314

5.12 Cover Open/Close

314

5.13 Check of Sensors

315

Figure 118 - Leakage Sensors

316

5.14 Water filter

317

5.16 Water Flow

317

5.16.1 Adjust Water Flow

318

5.16.2 Chiller

318

5.17 Cooling Chucks

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1 Cooling Bottom ON

320

2 Cooling Bottom

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Figure 123

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5.17.3 Cooling Time

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330 of 370

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5.19.1 Top Side

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5.19.2 Bottom side

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6 Quarterly Maintenance

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6.2.2 Thermo Chuck

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6.2.3 Maintenance Frequency

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6.3 Adjust heater offset

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6.4 TC Wafer Test

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7 Annual Inspection

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7.2 Cooling Lines

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Figure 134 - Water System

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Annual Inspection

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8 Troubleshooting

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8.3 Endvacuum not reached

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8.4 No High Voltage

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10 Lockout/Tagout

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11 Facility Requirements

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11.1 EVG520

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EaseUS Todo Backup

354

1 General Information

356

1.3 Pre-OS

357

2 Create Backup

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Figure 2 - System Backup

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Figure 4 - Backup progress

360

2.3 Create a Bootable Media

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Figure 7 - Building progress

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3 How to Recover

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3.1 Recover from Backup File

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How to Recover

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3.3 Recover using Pre-OS

367

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CDA EVG Series podręczniki

Cda EVG Series Instrukcje Operacyjne (370 strony)

Spis treści

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